Verisurf Alignment Report

Part Name: 020107_VVSA1_FLUX_ LOOP_MEASURED-AA
Alignment Name: Auto Align
Coord System: WORLD
Date: 02/07/07
 
 

Fit Results

Name DX DY DZ 3D
3D Point 1 0.001 0.015 -0.001 0.015
3D Point 2 0.000 0.002 0.008 0.008
3D Point 3 -0.011 -0.012 0.002 0.017
3D Point 4 0.003 -0.001 -0.005 0.006
3D Point 5 0.007 -0.004 -0.004 0.009

Fit Summary

Total Points: 5 DX DY DZ 3D
Maximum Deviation: 0.007 0.015 0.008 0.017
Minimum Deviation: -0.011 -0.012 -0.005 0.006
Deviation Range: 0.018 0.027 0.012 0.011
Average Deviation: 0.000 0.000 0.000 0.011
RMS Deviation: 0.006 0.009 0.004 0.012
Standard Deviation: 0.007 0.010 0.005 0.005

Transformation

X Y Z
Translation: 210.913 -2.981 0.390
Matrix I: 0.032 0.002 -0.999
Matrix J: 0.993 -0.114 0.032
Matrix K: -0.114 -0.993 -0.006