Verisurf Alignment Report

Part Name: 020107_VVSA1_FLUX_ LOOP_MEASURED-AA
Alignment Name: Auto Align
Coord System: WORLD
Date: 02/12/07
 
 

Fit Results

Name DX DY DZ 3D
3D Point 1 0.000 0.001 0.001 0.002
3D Point 2 0.001 0.013 -0.001 0.013
3D Point 3 0.003 0.001 -0.002 0.004
3D Point 4 -0.011 -0.012 0.004 0.016
3D Point 5 0.007 -0.004 -0.002 0.008

Fit Summary

Total Points: 5 DX DY DZ 3D
Maximum Deviation: 0.007 0.013 0.004 0.016
Minimum Deviation: -0.011 -0.012 -0.002 0.002
Deviation Range: 0.017 0.025 0.006 0.014
Average Deviation: 0.000 0.000 0.000 0.009
RMS Deviation: 0.006 0.008 0.002 0.010
Standard Deviation: 0.006 0.009 0.003 0.006

Transformation

X Y Z
Translation: 205.337 -1.623 2.188
Matrix I: 0.034 0.001 -0.999
Matrix J: 0.993 -0.114 0.034
Matrix K: -0.114 -0.993 -0.005