Verisurf Alignment Report

Part Name: 01_30_07_VVSA2_FLUX_TEMPLATE_PORT_12 J-AA
Alignment Name: Auto Align
Coord System: WORLD
Date: 01/30/07
 
 

Fit Results

Name DX DY DZ 3D
3D Point 1 -0.005 -0.001 0.002 0.006
3D Point 2 0.003 -0.003 0.002 0.005
3D Point 3 0.001 0.004 0.000 0.004
3D Point 4 0.002 0.000 -0.003 0.004

Fit Summary

Total Points: 4 DX DY DZ 3D
Maximum Deviation: 0.003 0.004 0.002 0.006
Minimum Deviation: -0.005 -0.003 -0.003 0.004
Deviation Range: 0.009 0.007 0.005 0.002
Average Deviation: 0.000 0.000 0.000 0.004
RMS Deviation: 0.003 0.002 0.002 0.005
Standard Deviation: 0.004 0.003 0.002 0.001

Transformation

X Y Z
Translation: 106.821 59.126 58.305
Matrix I: 0.557 0.466 -0.687
Matrix J: 0.531 0.437 0.726
Matrix K: 0.639 -0.769 -0.004